| 000 | 00566nam a2200181Ia 4500 | ||
|---|---|---|---|
| 005 | 20240725150154.0 | ||
| 008 | 231207s9999 xx 000 0 und d | ||
| 020 | _a9780819439956 | ||
| 040 | _cNCA Library | ||
| 082 |
_a763 _bWON |
||
| 100 | _aWong, Alfred Kwok Kit | ||
| 245 | 0 |
_aresolution enhancement techniques in optical lithography _cAlfred Kwok Kit Wong |
|
| 260 |
_bSPIE Press _aWashington _c2001 |
||
| 300 |
_axvii, 214p _bill |
||
| 546 | _aEnglish | ||
| 650 | _aIntegrated circuits--Design and consyruction, microlithography, printmaking | ||
| 942 | _cREF | ||
| 999 |
_c22679 _d22679 |
||