| 000 | 00556nam a2200193Ia 4500 | ||
|---|---|---|---|
| 005 | 20240725144623.0 | ||
| 008 | 231207s9999 xx 000 0 und d | ||
| 020 | _a9780819456601 | ||
| 040 | _cNCA Library | ||
| 082 |
_a763 _bLEV |
||
| 100 | _aLevinson, Harry J. | ||
| 245 | 0 |
_aPrinciples of lithography _cHarry J. Levinson |
|
| 250 | _a2nd edition | ||
| 260 |
_bSPIE Press _aWashington _c2005 |
||
| 300 |
_axii, 424p _bill |
||
| 546 | _aEnglish | ||
| 650 | _aIntegrated circuits--design and construction, microlithography, printmaking | ||
| 942 | _cREF | ||
| 999 |
_c22678 _d22678 |
||