TY  - BOOK
AU  - Wong, Alfred Kwok Kit
TI  - resolution enhancement techniques in optical lithography
SN  - 9780819439956
U1  - 763 
PY  - 2001///
CY  - Washington
PB  - SPIE Press
KW  - Integrated circuits--Design and consyruction, microlithography, printmaking
ER  -