Wong, Alfred Kwok Kit <br/><br/>
resolution enhancement techniques in optical lithography 
Alfred Kwok Kit Wong 
 - Washington  SPIE Press  2001 
 - xvii, 214p  ill 
<br/><br/><br/>English 
<br/><br/><label>ISBN: </label>9780819439956 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Integrated circuits--Design and consyruction, microlithography, printmaking
<br/><br/><label>Dewey Class. No.: </label>763  / WON