Levinson, Harry J. <br/><br/>
Principles of lithography 
Harry J. Levinson 
 - 2nd edition 
 - Washington  SPIE Press  2005 
 - xii, 424p  ill 
<br/><br/><br/>English 
<br/><br/><label>ISBN: </label>9780819456601 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Integrated circuits--design and construction, microlithography, printmaking
<br/><br/><label>Dewey Class. No.: </label>763  / LEV